The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2002

Filed:

Mar. 29, 2000
Applicant:
Inventors:

Michael Hans, Bludenz, AT;

Martin Zaech, Balzers, LI;

Assignee:

Unaxis Trading AG, Trubbach, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; C25B 1/100 ; B05C 1/100 ; B05C 1/300 ;
U.S. Cl.
CPC ...
C23C 1/434 ; C25B 1/100 ; B05C 1/100 ; B05C 1/300 ;
Abstract

A vacuum coating installation has at least a central distribution station which can be evacuated and has a transport arrangement driven in a controlled manner essentially along a plane, for the material to be treated. One operating station for the distribution station as well as at least two processing stations for the material to be treated are provided. The three or more stations communicate by way of operating openings with the distribution station, through which openings the material to be treated can be transported from one station into the other by the transport arrangement for the material to be treated. The material to be treated is formed by individual workpiece holders of the installation, each having a plurality of workpiece supports. On at least one of the processing stations, a drive and a driving connection, which can be established and released in a controlled manner, between the drive and the workpiece supports of a workpiece holder introduced in the processing station is provided for ensuring a three-dimensional workpiece processing in the processing station.


Find Patent Forward Citations

Loading…