The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2002
Filed:
Jul. 17, 2000
Masahito Mizukoshi, Nagoya, JP;
Denso Corporation, Kariya, JP;
Abstract
This invention provides a dynamical quantity sensor having a novel structure, wherein first beams are extended from side walls of a recess of a substrate , and an intermediate support member is disposed on the first beams . Second beams extending in a direction crossing substantially perpendicularly the first beams are disposed on the intermediate support member , and a weight is disposed on the second beams . Opposing electrodes and and opposing electrodes and are used as electrodes for excitation, and opposing electrodes and and opposing electrodes and are used as electrodes for detecting an angular velocity. The movement of the weight resulting from the application of the angular velocity is detected.