The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2002
Filed:
Dec. 04, 1998
Applicant:
Inventor:
Kazunori Iwamoto, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/758 ;
Abstract
A stage apparatus includes a stage moving in a prescribed direction while holding a substrate and a mechanism for generating a force that changes in accordance with an acceleration when the stage moves, and for applying the force to the substrate from the direction of the acceleration so that a force applied between the stage and the substrate by the acceleration is canceled.
Iwamoto, Kazunori. (2002). Stage apparatus, exposure apparatus and device manufacturing method (U.S. Patent No. 6469773). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6469773
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile