The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2002
Filed:
May. 12, 2000
Junji Suzuki, Tokyo, JP;
Tohru Ishizuya, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
Radiation detector arrays are provided that include one or more thermal-type displaceable elements having reduced thickness without compromising mechanical strength or sensitivity of the displaceable elements to incident radiation. An exemplary displaceable element includes first and second membrane layers made of materials having different coefficients of thermal expansion. The layers are supported relative to a substrate by a leg. The displaceable element can also serve as an absorbing member for the incident radiation to be detected. Each element can also include a reflector of signal light. When the displaceable element incident radiation (such as infrared radiation) to be detected, it undergoes heating which bends the element. Displacement of the element is detected as a change in signal light or as a change in capacitance. If the displaceable member includes a signal-light reflector, the reflector includes a planar portion including “dropped” edges serving to strengthen the planar portion and allow the thickness of the planar portion to be reduced.