The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2002
Filed:
Mar. 21, 2001
Kai Yang, San Jose, CA (US);
Suzette K. Pangrle, Cupertino, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A metal interconnect structure and method of making the same provides a low k dielectric layer on a substrate that contains the first metal line. A plurality of vias are formed in the low k dielectric layer, along with a second metal line. A first set of the plurality of vias are connected between the first and second metal lines, and a second set of the plurality of vias are not connected between the first and second metal lines. The second set of vias form dummy vias that increase the mechanical strength of the via layer and increase the resistance to delamination and scratching during chemical mechanical polishing.