Microelectromechanical system actuator for extended linear motion

Abstract

A microelectrical mechanical systems actuator that provides a long throw is disclosed. The actuator includes a drive mechanism that oscillates a pallet that is located between leg portions of a drive member. The pallet includes first and second rows of pallet teeth located along two opposite edges of the pallet. The drive member is slideably coupled to a substrate, and includes first and second rows of drive teeth that are located along two opposing drive margins of the drive member leg portions. The pallet teeth and the drive teeth are compatible so as to permit meshing engagement of the pallet teeth with the drive teeth. The pallet is arranged between the rows of drive teeth. When the pallet teeth are meshingly misaligned with respective drive teeth and the pallet is urged against the drive margin, the drive member is forced to move until the teeth meshingly engage. By arranging the pallet and drive teeth so that first and second respective sets of pallet and drive teeth can not simultaneously be in meshing alignment, the drive member may be incrementally moved by oscillating the pallet edges between the first and second drive margins. The shape of the pallet and drive teeth may be selected to control a step size of the movement increment and the force applied. Further, the pallet and drive teeth may be arranged so as to provide movement in one direction or two directions.