The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
Dec. 06, 2000
Yoshinori Harada, Kashihara, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
The sheet resistance meter has: a coil which produces a magnetic field; a sensor head provided to enable the magnetic field to induce eddy currents in a thin film formed on a substrate so that the lines of a magnetic force exerted by the magnetic field extend on one side of the substrate; a control device for detecting the sheet resistance of the thin film according to a variation of the magnetic field caused by the eddy currents; a capacitor for achieving resonance with the coil; and a groove section, a primary air port, an auxiliary air port, and a side air port, provided in the sensor head, for controlling the temperature of the coil. The arrangement stabilizes results of the measurement of a sheet resistance by a sheet resistance meter of a one-sided eddy current detection type when it is used continuously.