The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
Jun. 28, 2001
Applicant:
Inventor:
Jerry Tsiang, Cupertino, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 2/166 ;
Abstract
A method for monitoring silicide failures in the semiconductor process provides P-channel gate oxide capacitors on a semiconductor wafer. The breakdown voltages of the P-channel oxide gate capacitors are measured. With higher rapid thermal anneal (RTA) temperatures, an increased number of short failures occur in the P-channel gate oxide capacitors. Based on a correlation of the P-channel gate oxide capacitor failures and the RTA temperatures, the optimum RTA temperature for the silicide process is determined.