The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
Mar. 29, 2000
Motoyuki Tsuihiji, Gunma, JP;
Hirofumi Iinuma, Gunma, JP;
Sanyo Electric Co., Ltd., Osaka, JP;
Abstract
A fluid is filtered by first preparing a filter which includes a base filter and solid substances provided on the base filter, such that the solid substances differ from objects within the fluid to be filtered that are removed by the filter. The objects of filtration are filtered by supplying the fluid to the filter. During filtration, a force is applied to the filter to move the solid substances and objects deposited on the filter. The application of such force thus allows continuous filtration through the filter. The force can take the form of application of rising bubbles, a mechanical vibration or sonic waves to the filter. The filtration method is useful in processing fluid waste from mechanical processes, such as CMP steps.