The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
Sep. 27, 1999
Toby John Winters, Austin, TX (US);
Michael Patrick McFee, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A processing tool is provided that has a reaction chamber, a base, a flange, and an adjuster. The flange is coupled between the reaction chamber and the base and may be used to quickly connect/disconnect the reaction chamber for maintenance. The flange has a first, second and third bore extending therein. The first bore opens onto a first surface thereof, and the second and third bores open onto a second surface thereof. The reaction chamber is mounted to the flange via a first connector extending into the first opening, and the base is mounted to the flange via a second connector extending into the second opening. At least the second surface of said flange is accessible with the reaction chamber, base and flange in an assembled configuration. The adjuster extends through the base and into the third bore in the flange. The adjuster is adapted to cause movement of the flange in first and second opposite directions in response to movement thereof.