The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
Jul. 10, 1998
Applicant:
Inventor:
Gunter Igel, Teningen, DE;
Assignee:
Micronas Intermetall GmbH, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/12 ;
U.S. Cl.
CPC ...
G01L 9/12 ;
Abstract
The invention relates to a capacitor structure with two substrates ( ) each having a capacitor electrode ( ) deposited on its surface, the substrates ( ) being joined together by bump structures located on both sides of the capacitor electrodes ( ) such that the capacitor electrodes ( ) lie opposite each other and form a capacitor, the distance d between the capacitor electrodes ( ) being defined by the height of the bump structures, and measuring connections ( ) being provided on one of the substrates ( ) for making capacitance measurements.