The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2002
Filed:
May. 13, 1999
Applicant:
Inventors:
Bhanwar Singh, Morgan Hill, CA (US);
Carmen Morales, San Jose, CA (US);
Bharath Rangarajan, Santa Clara, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; G01R 3/126 ; H01L 2/1461 ; B24B 4/900 ;
U.S. Cl.
CPC ...
G06F 1/900 ; G01R 3/126 ; H01L 2/1461 ; B24B 4/900 ;
Abstract
The present invention relates to a test wafer for use in optimizing a process. The test wafer includes a substrate and a material layer formed over the substrate, wherein the material layer includes N number of test regions (N being an integer greater than one). At least one of the test regions has a material layer thickness different from another of the test regions. A spindle drive system is also provided for driving at least one spindle. One end of the at least one spindle is coupled to a polishing pad, which is employed in forming the test regions.