The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2002
Filed:
Jul. 14, 1999
Applicant:
Inventors:
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/04 ;
U.S. Cl.
CPC ...
H02N 2/04 ;
Abstract
A drive stage comprises a support body, a plurality of movable parts movably supported relative to the support body, and an actuator for driving the plurality of movable parts to move. The plurality of movable parts are driven by the actuator to move in directions selected to mutually offset the inertial forces generated in the respective movable parts. The drive stage is suitably used as incorporated into a scanning probe microscope or an information recording/reproducing apparatus for driving a probe or a mechanical stage supporting a specimen or a recording medium.