The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2002
Filed:
May. 16, 2000
Neil J. Peruffo, Poughkeepsie, NY (US);
Marc Postiglione, New Milford, CT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for correcting misalignment between a reticle and a stage in a MICRASCAN step-and-repeat exposure system. In such a system, the reticle and the stage lie in parallel X-Y planes and there are at least two temperature sensors associated with the reticle, sensor and sensor , sensor having a sensor temperature output and sensor having a sensor temperature output. The method comprises the steps of estimating an X shift and a Y shift of the reticle relative to the stage using the sensor temperature output and sensor temperature output and correcting misalignment between the reticle and the stage using the estimated X and Y shifts.