The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2002
Filed:
Nov. 23, 1999
Applicant:
Inventor:
Shunzo Imai, Yamato, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/758 ; G03B 2/764 ; B65G 1/708 ;
U.S. Cl.
CPC ...
G03B 2/758 ; G03B 2/764 ; B65G 1/708 ;
Abstract
A semiconductor manufacturing apparatus having a guard system, an interlocking system operable in response to loss of function in a portion of the guard system, to stop a corresponding operation in the apparatus, and an interlock disabling switch for disabling the interlocking through the interlocking system. The structure accomplishes prompt disabling of the interlocking, to improve the efficiency of a maintenance or service operation. A safeguard can be achieved without a decrease of throughput.