The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2002
Filed:
Nov. 28, 2000
Applicant:
Inventors:
Siddhartha Bhowmik, Orlando, FL (US);
Sailesh Chittipeddi, Allentown, PA (US);
Sailesh Mansinh Merchant, Orlando, FL (US);
Assignee:
Agere Systems Guardian Corp., Orlando, FL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ; H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/14763 ; H01L 2/144 ;
Abstract
The invention includes a process for copper metallization of an integrated circuit, comprising the steps of forming tantalum on a substrate, forming tantalum nitride over the tantalum, forming titanium nitride over the tantalum nitride, forming copper over the titanium nitride and integrated circuits made thereby. The invention is particularly useful in forming damascene structures with large aspect ratios.