The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2002
Filed:
Jun. 21, 2000
Applicant:
Inventors:
Faraz Abbasi, Indianapolis, IN (US);
Phil O, Greenwood, IN (US);
James Kent Knapp, Pittsboro, IN (US);
Lei Liu, Carmel, IN (US);
Assignee:
Praxair S. T. Technology, Inc., North Haven, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 3/14 ; C09G 1/02 ;
U.S. Cl.
CPC ...
C09K 3/14 ; C09G 1/02 ;
Abstract
The polishing slurry includes by weight percent, 0.1 to 50 metal oxy-acid accelerator, 0.5 to 50 cerium oxide abrasive particles and balance water. The metal oxy-acid accelerator is formed with a metal selected from the group consisting of chromium, lanthanum and rare earth metals 59 to 71, manganese, molybdenum, niobium, osmium, rhenium, ruthenium, titanium, tungsten, vanadium, yttrium and zirconium.