The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2002
Filed:
Jan. 02, 2001
Applicant:
Inventor:
Charles Stephen Rhoades, Diablo, CA (US);
Assignee:
Trikon Equipments Limited, Newport, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 1/04 ;
U.S. Cl.
CPC ...
B65G 1/04 ;
Abstract
Radial cluster tools, for example, include a central load/unload station and processing chambers for processing workpieces, such as semiconductor wafers. The processing chambers are arranged about the central load/unload station in abutting pairs to leave substantial maintenance spaces.