The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 24, 2002

Filed:

Mar. 10, 2000
Applicant:
Inventors:

Chris Royle, Cheshire, GB;

Colin H. J. Fox, Nottingham, GB;

Robert Victor Wright, London, GB;

Paul Kirby, Northhampton, GB;

Peter Enoksson, Stockholm, SE;

Goran Stemme, Stockholm, SE;

Chris Merveille, Tonsberg, NO;

Assignee:

Melexis, Tessenderlo, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 9/00 ;
U.S. Cl.
CPC ...
G01P 9/00 ;
Abstract

An integrated circuit combines micro-machined elements, piezoelectric elements and signal processing components as part of a compensated oscillating gyroscopic sensor for angular motion detection. An oscillating mass is supported on a number of flexible beams micro-machined into an integrated circuit device, such as a silicon CMOS device. Several Piezo-electric elements are also coupled to the beams to excite the mass and to measure the accelerations. Integrated in the device are electronic circuitry that initiates and maintains the oscillation and electronic circuitry that detects and measures the subsequent motion. Additional circuitry is also provided to determine the Coriolis acceleration and thus the magnitude of the external perturbing velocity.


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