The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Jun. 22, 2000
Stephen G. Sheck, Marble Falls, TX (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A semiconductor device substrate ( ) includes a semiconductor device ( ) and an alignment structure ( ) lying near the semiconductor device. The substrate ( ) includes a reflective layer ( ) and an antireflective layer ( ). The antireflective layer ( ) has a positional relationship with respect to the reflective layer ( ). The positional relationship is either such that the antireflective layer ( ) overlies all the reflective layer ( ) or such that none of the antireflective layer ( ) overlies the reflective layer ( ). The alignment structure ( ) includes an alignment feature ( ), such as an alignment key. The alignment structure ( ) allows for detection of contrasting light reflecting differentials as a continuous wave laser is targeted at the reflective layer ( ) and moved to the alignment feature ( ), in order to improve precision of alignment in manufacturing operations.