The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Dec. 01, 1999
Susumu Goto, Tama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention provides an electron beam exposure apparatus and electron lens which realize high resolution and high throughput simultaneously. In an electron beam exposure apparatus for irradiating a mask having a transfer pattern with an electron beam and projecting and transferring the pattern onto a substrate using an electron projecting lens, the electron projecting lens has a magnetic doublet lens. Each of the front- and rear-side electromagnetic lens sections of the magnetic doublet lens is constructed of a non-rotational lens. In each electro magnetic lens section, the non-rotational lens is constructed of a pair of electromagnetic lenses having symmetrical shapes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile