The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
May. 20, 1999
Masamichi Oi, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
A magnetism preventive cylinder is provided at a focused ion beam irradiating lens barrel tip, and an electricity preventive cylinder is mounted at an electron beam irradiating lens barrel tip. Also, the magnetism preventive cylinder is provided at the electron beam irradiating lens barrel tip in place of electricity preventive cylinder. The magnetism preventive cylinder at the focused ion beam irradiating lens barrel tip prevents a focused ion beam from being affected by a magnetic field from a focused ion beam. The electricity preventive cylinder at the electron beam irradiating lens barrel tip prevents against a magnetic field from the electron beam irradiating lens barrel tip.