The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
May. 15, 2001
Alfonso Maurelli, Milan, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A process for the integration in a semiconductor chip of an integrated circuit including a high-density integrated circuit components portion and a high-performance logic integrated circuit components portion, providing for: over a semiconductor substrate, insulatively placing a silicidated polysilicon layer that includes a polysilicon layer selectively doped in accordance to a conductivity type of at least the high-performance logic integrated circuit components, covered by a silicide layer; selectively covering the silicidated polysilicon layer with a hard mask; defining gate structures for the high-density integrated circuit components and for the high-performance logic integrated circuit components using said hard mask, the gate structures comprising the silicidated polysilicon layer covered with the hard mask; in a dielectric layer formed over the chip, forming contact openings for electrically contacting the high-density integrated circuit components and the high-performance logic integrated circuit components, wherein at least the contact openings for electrically contacting the high-density integrated circuit components are formed in self-alignment with the gate structures thereof.