The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Nov. 30, 2000
Yutaka Imai, Tokyo, JP;
Ayumu Taguchi, Tokyo, JP;
Hitoshi Tamada, Kanagawa, JP;
Hiroyuki Wada, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
The imaging magnification of an imaging optical system is set such that the image resolution of an ultraviolet CCD camera is within a range from 10 nm to 30 nm, on a resist pattern to be inspected. In addition, every time when the ultraviolet CCD camera picks up an image, the resist pattern to be inspected is irradiated at an irradiation light amount within a range from 0.5 mJ/cm to an irradiation threshold value at which the resist pattern is not caused to contract or an irradiation threshold value at which an absorption rate of an anti-reflection film provided near the resist pattern is not caused to change.