The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Mar. 07, 2000
Takanori Nakano, Nabari, JP;
Hiroshi Taniguchi, Nara, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A plasma generation apparatus includes a high-frequency power source section; a reaction container to which a material gas is to be supplied; a pair of electrodes that are provided in the reaction container so as to be opposed to each other to generate plasma in between when supplied with high-frequency power by the high-frequency power source section; a conductive connection member that is part of an outer wall of the reaction container and that has, on one side, at least one power source connecting point that is connected to the high-frequency power source section and has, on the other side, at least one electrode connecting point that is connected to the one of the pair of electrodes; and high-frequency current transmitting means provided in the conductive connection member in the vicinity of the at least one power source connecting point, for adjusting impedance between the at least one power source connecting point and the at least one electrode connecting point.