The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Sep. 29, 2000
Applicant:
Inventor:
Thomas P. Moyer, Lagrangeville, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 1/00 ;
U.S. Cl.
CPC ...
B24B 1/00 ;
Abstract
An apparatus for abrading a substrate including a moveable abrading tool having a bur for abrading the substrate, a stage for supporting the substrate, and a height sensing device in communication with the abrading tool to determine a vertical position of the bur with respect to the substrate. Further disclosed is a method for abrading a substrate using the foregoing apparatus including moving the abrading tool across the substrate so as to abrade the substrate, determining the vertical position of the bur with the height sensing device, and communicating the vertical position of the bur to the abrading tool.