The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Jul. 20, 2000
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 1/510 ;
U.S. Cl.
CPC ...
G01P 1/510 ;
Abstract
A semiconductor angular velocity sensor has a frame-shaped base portion, a detection oscillator connected to the base portion through a detection beam portion, and a drive oscillator connected to the detection oscillator through a drive beam portion. Each of the beam portions has a pair of beams each generally having a U shape and connected to each other through a bridge portion. Accordingly, the beam portions can have large rotational rigidity not to prevent oscillations of the oscillators.