The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Dec. 01, 2000
James M. O'Connor, Ellicott City, MD (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
A robust single-chip hydrogen sensor and a method for fabricating such a sensor. By adding an adhesion-promoting layer between the body of a sensor and an on-chip hydrogen-exposed electrically-resistive hydrogen-sensing element, device yields are improved when compared to directly applying the electrically-resistive hydrogen-sensing elements to the sensor body. The resistance of the sensing element is indicative of the hydrogen in the medium surrounding the sensor. According to a preferred embodiment of the present invention, the adhesion-promoting layer is a chromium (Cr) adhesion layer, and the hydrogen-exposed electrically resistive hydrogen sensing element is a PdNi alloy.