The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2002
Filed:
Mar. 12, 1999
Shuji Nakao, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
Based on data for a designed, patterned figure, data for first through third contour figures as well as data for under-sized and over-sized figures are derived. Comparisons between the under-sized figure and the third contour figure and between the over-sized figure and the second contour figure are performed to check adequateness of resolution of the patterned figure. When the resolution is determined inadequate, information on a portion having such inadequate resolution is output. According to this method of verifying resolution of a patterned figure, a portion in a photo resist with inadequate resolution can easily be detected, thus permitting efficient device development.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile