The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2002
Filed:
Sep. 15, 1999
Sung-Bong Kim, Suwon, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
Provided is a semiconductor device having a multi-level metallization. The device includes a semiconductor substrate having an active area, a first insulating layer deposited on the substrate, and first and second contact holes penetrating the first insulating layer exposing a predetermined surface of the active area. First and second conductive plugs are formed in the first and second contact holes, respectively. First and second conductive patterns are spaced a predetermined distance on both sides of the second conductive plug. The first conductive pattern is connected to the first conductive plug. An etching prevention layer and a second insulating layer are sequentially formed on the resultant structure. A third contact hole penetrates the second insulating layer and the etching prevention layer exposes a predetermined surface of the first conductive pattern. A fourth contact hole penetrates the second insulating layer and the etching prevention layer to expose the surface of the second conductive plug. Third and fourth conductive plugs are formed in the third and fourth contact holes, respectively. Third and fourth conductive patterns are individually formed on a predetermined area of the second insulating layer to be connected with the third and fourth conductive plugs, respectively.