The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2002
Filed:
Apr. 25, 2000
Applicant:
Inventors:
Takeaki Itsuji, Atsugi, JP;
Shunichi Shido, Zama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/700 ;
U.S. Cl.
CPC ...
H01J 3/700 ;
Abstract
A scanning probe having a piezo resistance cantilever section is used with a signal detector comprising a signal detection circuit for detecting a change in the piezo resistance and a circuit for removing an offset component from the signal. Such a scanning probe is used for a scanning probe microscope, in particular an atomic force microscope to obtain a high resolution surface image.