The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2002
Filed:
Jul. 14, 2000
Kenichi Mitsumori, Miyagi-ken, JP;
Nobuaki Haga, Miyagi-ken, JP;
Alps Electric Co., Ltd., Tokyo, JP;
Abstract
Disclosed is a drying nozzle for realizing a high-efficiency drying device capable of drying an object to be processed to a sufficient degree. The drying nozzle includes a drying gas supply portion having an air supply tube for supplying air for drying a substrate whose surface is wet with a liquid by being sprayed against the surface of the substrate, and a gas/liquid mixture discharge portion which is spaced apart from the surface of the substrate by a predetermined distance to thereby make the thickness of the liquid adhering to the surface of the substrate prior to the drying constant and which has a porous material having a large number of through-holes for discharging the air/liquid mixture consisting of air and the liquid,from the surface of the substrate, the drying gas supply portion and the gas/liquid mixture discharge portion being arranged along the surface of the object so as to be adjacent to each other.