The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Apr. 03, 2000
Fumio Akikuni, Tokyo, JP;
Katsushi Ohta, Tokyo, JP;
Tadao Nagatsuma, Tokyo, JP;
Mitsuru Shinagawa, Tokyo, JP;
Junzo Yamada, Tokyo, JP;
Other;
Abstract
An electro-optic sampling probe includes an electro-optic element which is to be positioned to contact wiring on an IC wafer surface which is a measurement target and whose optical characteristics are changed depending on an electric field applied via the wiring and an electro-optic sampling optical system module having a polarized beam splitter, a wave plate, and a photo diode. The module separates light, which is transmitted through the electro-optic element and is reflected by a surface of the electro-optic element from laser light emitted from the outside and converts the separated light into an electric signal, and includes an optical axis adjuster attached to a detachable portion of an optical fiber that emits the laser light for adjusting the optical axis of the laser light and a light receiving surface adjuster attached to the detachable portion of the photo diode for adjusting the position of a light receiving surface of the photo diode.