The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Sep. 15, 1999
Applicant:
Inventors:
Panagiotis G. Datskos, Knoxville, TN (US);
Slobodan Rajic, Knoxville, TN (US);
Irene C. Datskou, Knoxville, TN (US);
Charles M. Egert, Oak Ridge, TN (US);
Assignee:
UT-Battelle, LLC, Oak Ridge, TN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/56 ;
U.S. Cl.
CPC ...
G01J 1/56 ;
Abstract
A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.