The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Mar. 09, 2000
Applicant:
Inventors:
Rainer Gegenwart, Rödermark, DE;
Hilmar Richter, Niddatal-Assenheim, DE;
Assignee:
Antec Solar GmbH, Arnstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/400 ;
U.S. Cl.
CPC ...
C23C 1/400 ;
Abstract
Apparatus for depositing substrates by means of a CSS process comprising a heated receptacle ( ) for a supply ( ) of material to be deposited and carrier means for holding the substrate ( ) with its side to be deposited towards an opening ( ) of said receptacle, said receptacle opening ( ) being provided with a cover ( ) including a plurality of through-holes ( ) for the sublimated material, said cover separating said material supply ( ) from said substrate ( ) and, due to being heated to a temperature higher than that of said receptacle ( ), acting as sublimation source for said substrate.