The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Jul. 10, 2000
Applicant:
Inventor:
Russell Graham Bent, Bedfordshire, GB;
Assignee:
Unova U.K. Limited, Aylesbury, GB;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 7/00 ;
U.S. Cl.
CPC ...
B24B 7/00 ;
Abstract
A grinding machine, in particular a face grinder for grinding the faces of silicon wafers, has a grinding wheel spindle ( ) and a work spindle ( ) which are mounted so as to be pivotal about axes (A and B) respectively, each axis being perpendicular to the rotational axis of its respective spindle and being orthogonal to the rotation axis of the other spindle. Three sensors or probes ( to ) are provided to measure the position of one spindle relative to the other and to generate signals for controlling servo motors ( ) for adjusting the angular orientation of each spindle about its pivotal axis.