The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Dec. 14, 2000
William Pressnall, Richardson, TX (US);
Frank D. Poag, Plano, TX (US);
Richard L. Guldi, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A system ( ) is disclosed for cleaning a vertical furnace ( ) pedestal ( ) and cap ( ) including at least one inlet conduit ( ) in fluid communication with a pressurized cleaning medium source ( ). The system also includes at least one exhaust conduit ( ) in fluid communication with a negative pressure source ( ). A boat assembly ( ) may be positioned such that the at least one conduit ( ) is operable to direct cleaning medium at the boat assembly ( ) to dislodge contaminate particles associated with the boat assembly. The exhaust outlet ( ) then evacuates the cleaning medium and any dislodged contaminate particles. The system may operate automatically within a closed processing environment and after each process cycle.