The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
May. 21, 2001
Applicant:
Inventors:
Stephen J. Botos, Pittsburgh, PA (US);
Albert P. Ciez, Murrysville, PA (US);
Brian L. Favero, New Kensington, PA (US);
Assignee:
Aerotech, Inc., Pittsburgh, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/30 ;
U.S. Cl.
CPC ...
G01B 7/30 ;
Abstract
A low profile tilt stage comprises a planar base, a cradle defining a cylindrical surface having a cylindrical axis parallel to the base, a table mounted on the cradle by curvilinear bearings, a curvilinear direct drive brushless motor between the cradle and table, and an encoder reader fixed relative to the base and an encoder scale fixed to the table.