The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Nov. 27, 2000
Michael Ebert, Aalen, DE;
Franz Sorg, Aalen, DE;
Michael Trunz, Pfahlheim, DE;
Frank Marianek, Oberkochen, DE;
Karlfried Osterried, Aalen, DE;
Markus Kasparek, Oberkirch, DE;
Carl-Zeiss-Stiftung, Heindenheim, DE;
Abstract
A device for the low-deformation support of an optical element ( ), in particular of an end plate of a lens in a projection printing system for semiconductor elements, is provided with a mount ( ), the optical element ( ) being connected to the mount ( ) at least partly via a bonding layer which is located between the adjacent circumferential walls ( ) of mount ( ) and optical element ( ). The mount ( ) is provided with at least three bearing feet ( ) which are distributed over the circumference and on which the optical element ( ) rests. The bonding layer is located in an annular gap ( ) between the adjacent circumferential walls ( ) of mount ( ) and optical element ( ) over at least one section thereof.