The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Oct. 11, 2000
Applicant:
Inventor:
Ulrich Kaczynski, Bad Nauheim, DE;
Assignee:
Leica Microsystems Wetzlar GmbH, Wetzlar, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/100 ;
U.S. Cl.
CPC ...
G01N 2/100 ;
Abstract
A measuring instrument and a method for measuring patterns on substrates of various thicknesses are described. The measuring instrument comprises an X-Y carriage in which an opening is defined by a peripheral rim. An illumination optical system and multiple optical compensation elements serve to illuminate the measurement region. Multiple storage compartments for the optical compensation elements are shaped on the peripheral rim of the opening of the X-Y carriage. The optical compensation element needed in each case can be removed by the illumination optical system from the associated storage compartment.