The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Apr. 12, 2001
Yasuo Yamaguchi, Tokyo, JP;
Kunihiro Nakamura, Tokyo, JP;
Shiro Yamasaki, Tokyo, JP;
Teruya Fukaura, Hyogo, JP;
Other;
Abstract
Providing an acceleration sensor in which a base portion and a cap portion are bonded to each other and a sensor portion is sealed off between these two, and which has an improved bonding strength between the base portion and the cap portion. A sensor portion and a frame portion surrounding a periphery of the sensor portion are disposed on a semiconductor substrate. A base portion is comprised, where a diffusion preventing layer and a non-doped polycrystalline silicon layer are stacked one atop the other on the frame portion. A cap portion is comprised, where a nickel layer is formed on a base unit. The non-doped polycrystalline silicon layer of the base portion and the nickel layer of the cap portion are bonded to each other by eutectic bonding.