The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Feb. 14, 2000
Applicant:
Inventor:
Risaku Toda, Plano, TX (US);
Assignee:
Ball Semiconductor, Inc., Allen, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/114 ;
U.S. Cl.
CPC ...
B32B 3/114 ;
Abstract
A method and system for securing a small spherical shaped semiconductor substrate for processing operations, such as lithography, is disclosed. The substrate is secured by attaching it to a member and applying an adhering substance, such as photo resist, to the substrate and a portion of the member. The application may be by electroplating or other means. The electroplated substance securely attaches the substrate to the member so that one or more processing operations may be performed on the substrate. After processing, the substrate can be removed from the member.