The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Sep. 01, 2000
Yoshio Fujikawa, Shizuoka, JP;
Takayuki Itoh, Shizuoka, JP;
NTN Corporation, Osaka, JP;
Abstract
A compact externally pressurized gas bearing spindle assembly can increase the degree of vacuum in a vacuum chamber. In a spindle assembly wherein a rotary shaft is provided in a housing through a bearing gap, and compressed gas is introduced into the bearing gap to support the rotary shaft in a non-contact manner relative to the housing, an exhaust gas suction device for sucking gas discharged from the bearing gap is provided inside the housing or the rotary shaft. The bearing gap near the outside of the housing is smaller than the other bearing gap. Near the bearing gap near the outside of the housing, a non-contact seal gap is formed to prevent leakage of compressed gas into the vacuum chamber in a non-contact manner.