The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Oct. 11, 2000
Ulrich Kaczynski, Bad Nauheim, DE;
Leica Microsystems Wetzlar GmbH, Wetzlar, DE;
Abstract
An apparatus for fine positioning of a component has a symmetrical, one-piece double parallel spring element having a movable center bar, suspended on bending points, which carries the component. The center bar is preloaded in the direction of the frame by way of an elastic element. The center bar can be adjusted in almost ideally tilt-free fashion with a fine adjustment element arranged between the center bar and frame. A high-precision coordinate measuring instrument having a measurement stage for receiving a substrate that is to be measured, an incident-light and/or transmitted-light illumination device, and an imaging optical system with a vertical optical axis, has a fine positioning apparatus of this kind with a vertically arranged double parallel spring element. Mounted on its center bar is an objective holder, and thereon the objective with an objective axis parallel to the movement direction of the center bar.