The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2002

Filed:

Oct. 14, 2000
Applicant:
Inventor:

Theodore A. Khoury, Evanston, IL (US);

Assignee:

Adoamtest Corp., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract

A method of producing a contact structure having contactors on a semiconductor substrate by a microfabrication technology for achieving an electrical connection with a contact target. The method includes the steps of: providing a substrate made of dielectric or semiconductor material; forming an interconnect trace on the substrate either by deposition or plating; applying microfabrication processes for forming a contactor having a base portion vertically formed on the interconnect trace, a horizontal portion whose one end is formed on the base portion and a contact portion vertically formed on another end of the horizontal portion, and attaching a sphere contact to a top end of the contact portion of the contactor.


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