The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2002
Filed:
Nov. 09, 2000
Applicant:
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ;
Abstract
A system for varying the transmission of an attenuated phase shift mask ( ) is provided that includes an attenuated phase shift mask ( ), a transparent support ( ) and a modulation system ( ). The mask ( ) comprises a variable transmission material. The transparent support ( ) supports the mask ( ). The modulation system ( ) is operable to apply a variable force at the mask ( ) to control the transmission of the mask ( ).