The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2002
Filed:
Jul. 06, 1999
Applicant:
Inventors:
Atsushi Kubo, Osaka, JP;
Hirochika Ueyama, Osaka, JP;
Assignee:
Koyo Seiko Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 1/700 ; F04B 4/900 ;
U.S. Cl.
CPC ...
F04B 1/700 ; F04B 4/900 ;
Abstract
In a turbo-molecular pump, a rotor is supported by a magnetic bearing ( ) in a non-contact mode. A pump control section ( ) has a magnetic bearing control device ( ) with a digital signal operating processor or DSP ( ) which is programmable by a software or which can execute a programmed software. The digital signal operating processor ( ) performs the control of a heating system, namely, a heater, as well as the control of the magnetic bearing ( ).