The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2002

Filed:

Nov. 16, 2000
Applicant:
Inventor:

Kang Lee, Inchon-shi, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 2/107 ; C23F 1/46 ; H01L 2/1306 ;
U.S. Cl.
CPC ...
G05D 2/107 ; C23F 1/46 ; H01L 2/1306 ;
Abstract

Disclosed is an apparatus and method for regenerating an etchant solution comprising metal compounds. When a sample of the etchant solution is determined to be of lower etching ability than a predetermined criteria as a result of the monitoring and analyzing three colors(red, green, and blue) of the etchant with color sensors in association with a microprocessor, the etchant solution is reoxidized by the addition of a suitable additive solution. The apparatus and method can regenerate spent etchant solutions containing heavy metals in a semi-permanent manner within the module device without wasting a portion of them, so that, in addition to producing no pollution of the environment, it is economically very favorable with an increase in overall etching efficiency.


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