The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
Mar. 29, 2000
Toshiki Kaneko, Chiba, JP;
Masaru Takabatake, Mobara, JP;
Takahiro Ochiai, Mobara, JP;
Takuya Takahashi, Hitachi, JP;
Katsumi Tamura, Hitachi, JP;
Kenichi Onisawa, Hitachinaka, JP;
Kenichi Cyahara, Hitachi, JP;
Masatomo Terakado, Chiba, JP;
Yuichi Harano, Hitachi, JP;
Hideaki Yamamoto, Mobara, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The method of fabrication of a liquid crystal display device includes the steps of: forming a metal thin film on a glass substrate; forming a resist pattern on the metal thin film by photolithography; and wet-etching the metal thin film with an etchant formed of a mixture including phosphoric acid, nitric acid in a range between 7 mol % and 12 mol % inclusive, and at least one of ammonium fluoride and hydrogen fluoride in a trace amount of about 0.01 to 0.1 mol %.