The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2002

Filed:

Sep. 21, 2000
Applicant:
Inventors:

Junichi Mita, Saitama, JP;

Kazuhito Yamamoto, Tokyo, JP;

Hiroto Ueno, Tokyo, JP;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 3/500 ; H01F 6/00 ;
U.S. Cl.
CPC ...
C30B 3/500 ; H01F 6/00 ;
Abstract

A magnetic-field thermal treatment apparatus is used to carry out a thermal treatment for plural substrates, which are placed in a vacuum chamber, as a magnetic field is applied to the substrates. Around the vacuum chamber, a heater and a solenoid type cryocooler-cooled superconductive magnet unit as a magnetic field generating unit are provided. The substrates held in a substrate holder are retained in the interior of the vacuum chamber so that the surfaces of the substrates become parallel to one another in a vertical direction. The superconductive magnet unit has at least one superconductive coil surrounding the vacuum chamber horizontally so as to exert the magnetic field, which is parallel to the surfaces of the substrates, on the substrates.


Find Patent Forward Citations

Mita, Junichi. (2002). Magnetic-field thermal treatment apparatus capable of reducing weight and utility consumption thereof (U.S. Patent No. 6433661). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6433661

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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